Eight parametric resonances in a multi-frequency wideband MEMS piezoelectric vibration energy harvester


This paper presents a multi-order parametric resonant MEMS piezoelectric disk membrane, for the purpose of broadening the operational frequency bandwidth of a vibration energy harvester by employing the nonlinearity-induced bandwidth broadening associated with this phenomenon as well as the multi-frequency response associated with the higher orders. The fundamental mode -3dB bandwidth at 2.0 g recorded 55 Hz, while the first parametric resonant peak exhibited 365 Hz and the -3dB of the first 8 orders accumulated to 604 Hz. The membrane parametric resonator also experimentally demonstrated over 3-folds improvement in power density compared to a conventional direct resonator (cantilever), when subjected to band-limited white noise.

Publication DOI: https://doi.org/10.1109/MEMSYS.2016.7421863
Divisions: College of Engineering & Physical Sciences > School of Engineering and Technology > Mechanical, Biomedical & Design
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Event Title: IEEE 29th International Conference on Micro Electro Mechanical Systems
Event Type: Other
Event Dates: 2016-01-24 - 2016-01-28
ISBN: 978-1-5090-1973-1
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Related URLs: https://ieeexpl ... ocument/7421863 (Publisher URL)
PURE Output Type: Conference contribution
Published Date: 2016-02-29
Accepted Date: 2016-01-01
Authors: Jia, Yu (ORCID Profile 0000-0001-9640-1666)
Du, Sijun
Seshia, Ashwin A



Version: Accepted Version

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