The growth, structure and properties of sputtered barium titanate thin films


The design and construction of a sputtering system for the deposition of barium titanate thin films is described. The growth and structure of barium titanate films deposited on a variety of substrates including amorphous carbon fi1ms, potassium bromide single crystals, and polycrystalline gold films has been studied. Films deposited on all substrates at room temperature were amorphous. Polycrystalline titanate films were formed on polycrystalline and amorphous substrates at temperatures above 450°C while films with a pronounced texture could be expitaxially deposited on single crystal potassium bromide above a temperature of only 200°C. Results of dielectric measurements made on the films are reported. Amorphous films were highly insulating (resistivities ~1014 with dielectric constants of between 10 and 20.

Divisions: College of Engineering & Physical Sciences
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Institution: Aston University
Uncontrolled Keywords: growth,structure,properties,sputtered barium titanate thin films
Last Modified: 08 Dec 2023 08:02
Date Deposited: 13 Jan 2011 10:40
Completed Date: 1972-09
Authors: Newman, Robert M.


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