Chemistry of plasmas used in the fabrication of integrated circuits

Divisions: College of Engineering & Physical Sciences > School of Infrastructure and Sustainable Engineering > Chemical Engineering & Applied Chemistry
Additional Information: Department: Chemistry Digitised thesis available via EThOS
Institution: Aston University
Uncontrolled Keywords: Chemistry,plasmas,fabrication,integrated circuits
Last Modified: 08 Dec 2023 08:15
Date Deposited: 13 Jan 2011 11:55
Completed Date: 1982
Authors: Simpson, Michael


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