An Umbrella-Shaped Topology for Broadband MEMS Piezoelectric Vibration Energy Harvesting

Abstract

While cantilever topologies offer high power responsiveness for MEMS vibration energy harvesting (VEH), they are less robust than multiply clamped or membrane topologies. This paper attempts to address this topological optimisation dilemma by attempting to achieve both high power density and robustness. The proposed umbrella-shaped topology constituents of a single central anchor while the membrane area extends outwards and is further enclosed by a ring of proof mass. Implemented on a 0.5 μm AlN on 10 μm doped Si process, a fabricated device (121 mm2 die area) recorded a peak power of 173 μW (1798 Hz and 0.56 g). The normalised power density compares favourably against the state-of-the-art cantilever piezoelectric MEMS VEH, while not sacrificing robustness. Furthermore, this device offers a broadband response, and it has experimentally demonstrated over 3 times higher band-limited noise induced power density than a cantilevered harvester fabricated using the same process.