White Noise Responsiveness of an AlN Piezoelectric MEMS Cantilever Vibration Energy Harvester

Abstract

This paper reports the design, analysis and experimental characterisation of a piezoelectric MEMS cantilever vibration energy harvester, the enhancement of its power output by adding various values of end mass, as well as assessing the responsiveness towards white noise. Devices are fabricated using a 0.5 μm AlN on 10 μm doped Si process. Cantilevers with 5 mm length and 2 mm width were tested at either unloaded condition (MC0: fn 577 Hz) or subjected to estimated end masses of 2 mg (MC2: fn 129 Hz) and 5 mg (MC5: fn 80 Hz). While MC0 was able to tolerate a higher drive acceleration prior to saturation (7 g with 0.7 μW), MC5 exhibited higher peak power attainable at a lower input vibration (2.56 μW at 3 ms−2). MC5 was also subjected to band-limited (10 Hz to 2 kHz) white noise vibration, where the power response was only a fraction of its resonant counterpart for the same input: peak instantaneous power >1 μW was only attainable beyond 2 g of white noise, whereas single frequency resonant response only required 2.5 ms−2. Both the first resonant response and the band-limited white noise response were also compared to a numerical model, showing close agreements.

Publication DOI: https://doi.org/10.1088/1742-6596/557/1/012037
Divisions: College of Engineering & Physical Sciences > Mechanical Engineering & Design
College of Engineering & Physical Sciences
Additional Information: Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
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Related URLs: https://iopscie ... 96/557/1/012037 (Publisher URL)
PURE Output Type: Conference article
Published Date: 2014-08-18
Authors: Jia, Yu (ORCID Profile 0000-0001-9640-1666)
Seshia, Ashwin A

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