Comparison of Five Topologies of Cantilever-based MEMS Piezoelectric Vibration Energy Harvesters


In the realm of MEMS piezoelectric vibration energy harvesters, cantilever-based designs are by far the most popular. Despite being deceptively simple, the active piezoelectric area near the clamped end is able to accumulate maximum strain-generated-electrical-charge, while the free end is able to accommodate a proof mass without compromising the effective area of the piezoelectric generator since it experiences minimal strain anyway. While other contending designs do exist, this paper investigates five micro-cantilever (MC) topologies, namely: a plain MC, a tapered MC, a lined MC, a holed MC and a coupled MC, in order to assess their relative performance as an energy harvester. Although a classical straight and plain MC offers the largest active piezoelectric area, alternative MC designs can potentially offer higher average mechanical strain distribution for a given mechanical loading. Numerical simulation and experimental comparison of these 5 MCs (0.5 μ AlN on 10 μm Si) with the same practical dimensions of 500 μm and 2000 μm, suggest a cantilever with a coupled subsidiary cantilever yield the best power performance, closely followed by the classical plain topology.

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Divisions: College of Engineering & Physical Sciences > School of Engineering and Technology > Mechanical, Biomedical & Design
College of Engineering & Physical Sciences
Additional Information: Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publication ISSN: 1742-6596
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Related URLs: https://iopscie ... 96/557/1/012086 (Publisher URL)
PURE Output Type: Conference article
Published Date: 2014-11-18
Authors: Jia, Yu (ORCID Profile 0000-0001-9640-1666)
Seshia, Ashwin A



Version: Published Version

License: Creative Commons Attribution

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