A Hybrid Vibration Powered Microelectromechanical Strain Gauge

Abstract

This paper reports the demonstration of an ultra-low-power micro-electromechanical system (MEMS)-CMOS oscillator for strain sensing, powered by a miniature piezoelectric vibration energy harvester (VEH). The employment of the Pierce oscillator topology in a MEMS-CMOS oscillator allows for the minimization of the power requirement to as low as 1.1 μW under ideal conditions. A VEH prototype, developed with hard lead zirconate titanate on a stainless steel substrate (∼0.4 -cm 3 practical operational volume), is able to deliver a typical average power of 187 μW at 11.4 ms−2 and 514 Hz. Some of the practical challenges associated with the integration of the harvester and the MEMS sensor have also been explored, which helps to lay the foundation for realizing net-zero-power strain sensors.

Publication DOI: https://doi.org/10.1109/JSEN.2015.2479295
Divisions: College of Engineering & Physical Sciences
Additional Information: © 2015 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works.
Publication ISSN: 1558-1748
Full Text Link:
Related URLs: https://ieeexpl ... ocument/7270276 (Publisher URL)
PURE Output Type: Article
Published Date: 2015-09-16
Authors: Jia, Yu (ORCID Profile 0000-0001-9640-1666)
Do, Cuong D.
Zou, Xudong
Seshia, Ashwin A

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