Large scale fabrication of nitrogen vacancy-embedded diamond nanostructures for single-photon source applications


Some color centers in diamond can serve as quantum bits which can be manipulated with microwave pulses and read out with laser, even at room temperature. However, the photon collection efficiency of bulk diamond is greatly reduced by refraction at the diamond/air interface. To address this issue, we fabricated arrays of diamond nanostructures, differing in both diameter and top end shape, with HSQ and Cr as the etching mask materials, aiming toward large scale fabrication of single-photon sources with enhanced collection efficiency made of nitrogen vacancy (NV) embedded diamond. With a mixture of O2 and CHF3 gas plasma, diamond pillars with diameters down to 45 nm were obtained. The top end shape evolution has been represented with a simple model. The tests of size dependent single-photon properties confirmed an improved single-photon collection efficiency enhancement, larger than tenfold, and a mild decrease of decoherence time with decreasing pillar diameter was observed as expected. These results provide useful information for future applications of nanostructured diamond as a single-photon source.

Publication DOI:
Divisions: College of Engineering & Physical Sciences > Aston Institute of Materials Research (AIMR)
Additional Information: © IOP
Uncontrolled Keywords: diamond,large scale fabrication,nitrogen vacancy,single-photon source,Physics and Astronomy(all)
Publication ISSN: 1741-4199
Last Modified: 05 Feb 2024 08:19
Date Deposited: 19 Aug 2019 10:09
Full Text Link: http://iopscien ... 56/25/11/118105
Related URLs: http://www.scop ... tnerID=8YFLogxK (Scopus URL)
PURE Output Type: Article
Published Date: 2016-11
Published Online Date: 2016-09-30
Accepted Date: 2016-09-28
Submitted Date: 2016-06-24
Authors: Jiang, Qianqing
Li, Wuxia
Tang, Chengchun
Chang, Yanchun
Hao, Tingting
Pan, Xinyu
Ye, Haitao (ORCID Profile 0000-0002-4005-4922)
Li, Junjie
Gu, Changzhi



Version: Accepted Version

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