Highly-sensitive anisotropic porous silicon based optical sensors


The modeling, fabrication and characterization of PSi fabricated from both (110) and (100) surface oriented silicon for optical sensing is thoroughly reported. First, based on the generalized Bruggeman method, the birefringence and sensitivity of the fabricated membranes were calculated as a function of the fabrication parameters such as porosity and pore sizes; and external effects, such as the pores surface oxidation. Thereafter we report on the fabrication of PSi membranes from (110) and (100) surface oriented silicon with pore sizes in the range of 50-80 nm, and the characterization of their birefringence using a polarimetric setup. Their sensitivities were determined by filling the pores with several liquids having different refractive index. As a result, sensitivities as high as 1407 nm/RIU were obtained for the (110) samples at a 1500 nm wavelength and 382 nm/RIU for the (100) samples at the same wavelength.

Publication DOI: https://doi.org/10.1117/12.908214
Divisions: College of Engineering & Physical Sciences > Aston Institute of Photonics Technology (AIPT)
Additional Information: Copyright 2012 SPIE. One print or electronic copy may be made for personal use only. Systematic reproduction, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Uncontrolled Keywords: birefringence,optical sensor,phase retardation,Porous silicon,Electronic, Optical and Magnetic Materials,Atomic and Molecular Physics, and Optics,Biomaterials,Radiology Nuclear Medicine and imaging
Publication ISSN: 1996-756X
Last Modified: 08 Jan 2024 08:59
Date Deposited: 18 Feb 2019 15:36
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Related URLs: http://www.scop ... tnerID=8YFLogxK (Scopus URL)
https://www.spi ... /12.908214.full (Publisher URL)
PURE Output Type: Conference article
Published Date: 2012-01-31
Authors: Álvarez, Jesús
Bettotti, Paolo
Kumar, Neeraj
Suárez, Isaac
Hill, Daniel (ORCID Profile 0000-0003-3510-7783)
Martínez-Pastor, Juan



Version: Published Version

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