Vertical multiple-slot waveguide ring resonators in silicon nitride


This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 μm, 90 μm and 110 μm) have been carried out for TE and TM polarizations at the wavelength of 1.3 μm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.

Publication DOI:
Divisions: College of Engineering & Physical Sciences > Aston Institute of Photonics Technology (AIPT)
Additional Information: ©2008 Optical Society of America. This is an open access article according to the OSA Publishing guidelines
Uncontrolled Keywords: Atomic and Molecular Physics, and Optics
Publication ISSN: 1094-4087
Last Modified: 08 Jan 2024 08:59
Date Deposited: 18 Feb 2019 15:05
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Related URLs: http://www.scop ... tnerID=8YFLogxK (Scopus URL)
https://www.osa ... =oe-16-22-17237 (Publisher URL)
PURE Output Type: Article
Published Date: 2008-10-27
Authors: Vivien, Laurent
Marris-Morini, Delphine
Griol, Amadeu
Gylfason, Kristinn B.
Hill, Daniel (ORCID Profile 0000-0003-3510-7783)
Álvarez, Jesús
Sohlström, Hans
Hurtado, Juan
Bouville, David
Cassan, Eric



Version: Published Version

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