The Laser MicroJet® (LMJ) - A multi-solution technology for high quality micro-machining


The field of laser micromachining is highly diverse. There are many different types of lasers available in the market. Due to their differences in irradiating wavelength, output power and pulse characteristic they can be selected for different applications depending on material and feature size [1], The main issues by using these lasers are heat damages, contamination and low ablation rates, This report examines on the application of the Laser MicroJet® (LMJ), a unique combination of a laser beam with a hair-thin water jet as a universal tool for micro-machining of MEMS substrates, as well as ferrous and non-ferrous materials. The materials include gallium arsenide (GaAs) & silicon wafers, steel, tantalum and alumina ceramic. A Nd:YAG laser operating at 1064 nm (infra red) and frequency doubled 532 nm (green) were employed for the micro-machining of these materials.

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Divisions: Aston University (General)
Additional Information: Copyright 2007 SPIE. One print or electronic copy may be made for personal use only. Systematic reproduction, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Uncontrolled Keywords: Laser microjet®,MEMS,Micro-machining,Water guided laser,Electronic, Optical and Magnetic Materials,Condensed Matter Physics,Computer Science Applications,Electrical and Electronic Engineering,Applied Mathematics
Publication ISSN: 1996-756X
Last Modified: 27 Jun 2024 09:43
Date Deposited: 15 Nov 2018 09:19
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Related URLs: http://www.scop ... tnerID=8YFLogxK (Scopus URL)
https://www.spi ... 1070.full?SSO=1 (Publisher URL)
PURE Output Type: Conference article
Published Date: 2007
Authors: Mai, Tuan Anh
Richerzhagen, Bernold
Snowdon, Paul C.
Wood, David
Maropoulos, Paul G. (ORCID Profile 0000-0001-6525-6216)



Version: Published Version

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