Stealth dicing of sapphire wafers with near infra-red femtosecond pulses


The quality of the reflecting faces after dicing is critical for the fabrication of efficient and stable laser diodes emitting in the green–violet region. However, high-quality faces can be difficult to achieve for devices grown on a sapphire substrate as this material is difficult to cleave cleanly. We have therefore investigated a technology known as “stealth dicing”. The technology uses a pulsed laser to damage a plane of material inside of the wafer due to multi-photon absorption instead of cutting through the wafer surface. If the damage is induced in a line of stress points, the sample can then be cleaved easily along the damaged plane to leave a high-quality surface. The use of this technique also reduces thermal damage and debris.

Publication DOI:
Divisions: College of Engineering & Physical Sciences > Aston Institute of Photonics Technology (AIPT)
College of Engineering & Physical Sciences
College of Engineering & Physical Sciences > School of Computer Science and Digital Technologies
Additional Information: © The Author(s) 2017. This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (, which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.
Uncontrolled Keywords: Chemistry(all),Materials Science(all)
Publication ISSN: 1432-0630
Last Modified: 15 Apr 2024 07:21
Date Deposited: 15 May 2017 12:55
Full Text Link: http://www.scop ... tnerID=MN8TOARS
Related URLs: https://link.sp ... 0339-017-0927-0 (Publisher URL)
PURE Output Type: Article
Published Date: 2017-05
Published Online Date: 2017-04-25
Accepted Date: 2017-03-23
Submitted Date: 2016-12-05
Authors: Yadav, Amit (ORCID Profile 0000-0001-7865-6905)
Kbashi, Hani (ORCID Profile 0000-0002-6343-248X)
Kolpakov, Stanislav (ORCID Profile 0000-0001-6947-8289)
Gordon, Neil (ORCID Profile 0000-0002-1474-9739)
Zhou, Kaiming (ORCID Profile 0000-0002-6011-1912)
Rafailov, Edik U. (ORCID Profile 0000-0002-4152-0120)



Version: Published Version

License: Creative Commons Attribution

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