Dubov, Mykhaylo, Natarajan, S.R., Williams, John A.R. and Bennion, Ian (2008). Mask-less lithography for fabrication of optical waveguides. IN: Commercial and biomedical applications of ultrafast lasers VIII. Neev, Joseph; Nolte, Stefan; Heisterkamp, Alexander and Schaffer, Christopher B. (eds) SPIE proceedings, 6881 . USA: SPIE.
Abstract
A flexible method for fabricating shallow optical waveguides by using femtosecond laser writing of patterns on a metal coated glass substrate followed by ion-exchange is described. This overcomes the drawbacks of low index contrast and high induced stress in waveguides directly written using low-repetition rate ultrafast laser systems. When compared to conventional lithography, the technique is simpler and has advantages in terms of flexibility in the types of structures which can be fabricated.
| Publication DOI: | https://doi.org/10.1117/12.762594 |
|---|---|
| Divisions: | College of Engineering & Physical Sciences > Aston Institute of Photonics Technology (AIPT) |
| Additional Information: | M. Dubov ; S. R. Natarajan ; J. A. R. Williams and I. Bennion "Mask-less lithography for fabrication of optical waveguides", Proc. SPIE 6881, Commercial and Biomedical Applications of Ultrafast Lasers VIII, 688110 (February 15, 2008); doi:10.1117/12.762594. Copyright 2008 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. http://dx.doi.org/10.1117/12.762594 |
| Event Title: | Commercial and Biomedical Applications of Ultrafast Lasers VIII |
| Event Type: | Other |
| Event Dates: | 2008-01-20 - 2008-01-23 |
| Uncontrolled Keywords: | glass,ion exchange,lithography,substrates,ultrashort pulses,femtosecond lithography,mask-less,planar lightwave circuit,Electrical and Electronic Engineering,Condensed Matter Physics |
| ISBN: | 978-0-8194-7056-0 |
| Last Modified: | 04 Nov 2024 09:40 |
| Date Deposited: | 17 Jun 2015 12:42 |
| Full Text Link: | |
| Related URLs: |
http://www.scop ... tnerID=8YFLogxK
(Scopus URL) http://proceedi ... rticleid=821833 (Publisher URL) |
PURE Output Type: | Conference contribution |
| Published Date: | 2008-02-15 |
| Authors: |
Dubov, Mykhaylo
(
0000-0002-6764-683X)
Natarajan, S.R. Williams, John A.R. (
0000-0002-9554-6633)
Bennion, Ian |
CORE (COnnecting REpositories)
CORE (COnnecting REpositories)