Femtosecond laser microfabrication of subwavelength structures in photonics


This paper describes experimental and numerical results of the plasma-assisted microfabrication of subwavelength structures by means of point-by point femtosecond laser inscription. It is shown that the spatio-temporal evolution of light and plasma patterns critically depend on input power. Subwavelength inscription corresponds to the supercritical propagation regimes when pulse power is several times self-focusing threshold. Experimental and numerical profiles show quantitative agreement.

Additional Information: Vladimir Mezentsev ; Jovana S. Petrovic ; Mykhaylo Dubov ; Ian Bennion ; Jürgen Dreher ; Holger Schmitz and Rainer Grauer, "Femtosecond laser microfabrication of subwavelength structures in photonics", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590B (March 13, 2007); doi:10.1117/12.705800. Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. http://dx.doi.org/10.1117/12.705800
Event Title: Laser-based micro- and nanopackaging and assembly
Event Type: Other
Event Location: San Jose, CA
Event Dates: 2007-01-22 - 2007-01-24
Uncontrolled Keywords: light propagation, photonic devices, photonics, ultrashort pulses, femtosecond laser inscription, self-focusing threshold, subwavelength structures
ISBN: 978-0-8194-6572-6
Last Modified: 23 Oct 2019 12:46
Date Deposited: 29 Jan 2013 15:12
Published Date: 2007-03-13
Authors: Mezentsev, Vladimir
Petrovic, Jovana
Dubov, Mykhaylo
Bennion, Ian
Dreher, Jürgen
Schmitz, Holger
Grauer, Rainer


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