Mezentsev, Vladimir, Petrovic, Jovana, Dubov, Mykhaylo, Bennion, Ian, Dreher, Jürgen, Schmitz, Holger and Grauer, Rainer (2007). Femtosecond laser microfabrication of subwavelength structures in photonics. IN: Laser-based micro- and nanopackaging and assembly. Pfleging, Wilhelm; Lu, Yongfeng; Washio, Kunihiko; Bachmann, Friedrich G. and Hoving, Willem (eds) SPIE proceedings, 6459 . SPIE.
Abstract
This paper describes experimental and numerical results of the plasma-assisted microfabrication of subwavelength structures by means of point-by point femtosecond laser inscription. It is shown that the spatio-temporal evolution of light and plasma patterns critically depend on input power. Subwavelength inscription corresponds to the supercritical propagation regimes when pulse power is several times self-focusing threshold. Experimental and numerical profiles show quantitative agreement.
Additional Information: | Vladimir Mezentsev ; Jovana S. Petrovic ; Mykhaylo Dubov ; Ian Bennion ; Jürgen Dreher ; Holger Schmitz and Rainer Grauer, "Femtosecond laser microfabrication of subwavelength structures in photonics", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590B (March 13, 2007); doi:10.1117/12.705800. Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. http://dx.doi.org/10.1117/12.705800 |
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Event Title: | Laser-based micro- and nanopackaging and assembly |
Event Type: | Other |
Event Location: | San Jose, CA |
Event Dates: | 2007-01-22 - 2007-01-24 |
Uncontrolled Keywords: | light propagation, photonic devices, photonics, ultrashort pulses, femtosecond laser inscription, self-focusing threshold, subwavelength structures |
ISBN: | 978-0-8194-6572-6 |
Last Modified: | 17 Oct 2024 14:34 |
Date Deposited: | 29 Jan 2013 15:12 |
Published Date: | 2007-03-13 |
Authors: |
Mezentsev, Vladimir
Petrovic, Jovana Dubov, Mykhaylo Bennion, Ian Dreher, Jürgen Schmitz, Holger Grauer, Rainer |