Design and fabrication of a nonlinear micro impact oscillator


In this paper we describe the design and fabrication of a mechanical autonomous impact oscillator with a MEMS resonator as the frequency control element. The design has been developed with scalability to large 2-D arrays of coupled oscillators in mind. The dynamic behaviour of the impact oscillator was numerically studied and it was found that the geometry nonlinearity has an effect on the static pull-in voltage and equilibrium position. The external driving power can alter the frequency of the impact oscillator. The autonomous nature of the oscillator simplifies the complexity of the drive circuitry and is essential for large 2-D arrays.

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Divisions: College of Engineering & Physical Sciences > Systems analytics research institute (SARI)
Additional Information: © 2009 Published by Elsevier B.V. Open access under CC BY-NC-ND license.
Uncontrolled Keywords: nonlinear,electrostatic,impact oscillator,autonomous,Chemical Engineering(all),Chemistry(all)
Publication ISSN: 1876-6196
Last Modified: 03 Apr 2024 07:09
Date Deposited: 30 Apr 2012 13:47
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Related URLs: http://www.scop ... tnerID=8YFLogxK (Scopus URL)
PURE Output Type: Article
Published Date: 2009-09
Published Online Date: 2009-08-31
Authors: Wei, Xueyong
Anthony, Carl
Lowe, David
Ward, Mark

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