Displacement sensor using channelled spectrum dispersed on a linear CCD array


A novel form of low coherence interferometric sensor is described. The channelled spectrum produced by illuminating a sensing interferometer with a broadband source is analysed directly using a CCD array. The system currently provides unambiguous measurement over a range of 1.5 mm with an accuracy of better than 6 µm.

Uncontrolled Keywords: laser diode source, channelled spectrum, linear CCD array, low coherence interferometric sensor, broadband source, 1.5 mm
Publication ISSN: 0013-5194
Last Modified: 23 Oct 2019 11:28
Date Deposited: 28 Apr 2011 10:21
Published Date: 1993-05-13
Authors: Taplin, S.
Podleanu, A.G.
Webb, David J.
Jackson, David A.


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