Highly-sensitive anisotropic porous silicon based optical sensors

Álvarez, Jesús, Bettotti, Paolo, Kumar, Neeraj, Suárez, Isaac, Hill, Daniel and Martínez-Pastor, Juan (2012). Highly-sensitive anisotropic porous silicon based optical sensors. Proceedings of SPIE - International Society for Optical Engineering, 8212 ,

Abstract

The modeling, fabrication and characterization of PSi fabricated from both (110) and (100) surface oriented silicon for optical sensing is thoroughly reported. First, based on the generalized Bruggeman method, the birefringence and sensitivity of the fabricated membranes were calculated as a function of the fabrication parameters such as porosity and pore sizes; and external effects, such as the pores surface oxidation. Thereafter we report on the fabrication of PSi membranes from (110) and (100) surface oriented silicon with pore sizes in the range of 50-80 nm, and the characterization of their birefringence using a polarimetric setup. Their sensitivities were determined by filling the pores with several liquids having different refractive index. As a result, sensitivities as high as 1407 nm/RIU were obtained for the (110) samples at a 1500 nm wavelength and 382 nm/RIU for the (100) samples at the same wavelength.

Publication DOI: https://doi.org/10.1117/12.908214
Divisions: Engineering & Applied Sciences > Aston Institute of Photonics Technology
Additional Information: Copyright 2012 SPIE. One print or electronic copy may be made for personal use only. Systematic reproduction, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Uncontrolled Keywords: birefringence,optical sensor,phase retardation,Porous silicon,Electronic, Optical and Magnetic Materials,Atomic and Molecular Physics, and Optics,Biomaterials,Radiology Nuclear Medicine and imaging
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Related URLs: http://www.scop ... tnerID=8YFLogxK (Scopus URL)
https://www.spi ... /12.908214.full (Publisher URL)
Published Date: 2012-01-31
Authors: Álvarez, Jesús
Bettotti, Paolo
Kumar, Neeraj
Suárez, Isaac
Hill, Daniel ( 0000-0003-3510-7783)
Martínez-Pastor, Juan

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