Large scale fabrication of nitrogen vacancy-embedded diamond nanostructures for single-photon source applications

Jiang, Qianqing, Li, Wuxia, Tang, Chengchun, Chang, Yanchun, Hao, Tingting, Pan, Xinyu, Ye, Haitao, Li, Junjie and Gu, Changzhi (2016). Large scale fabrication of nitrogen vacancy-embedded diamond nanostructures for single-photon source applications. Chinese Physics B, 25 (11),


Some color centers in diamond can serve as quantum bits which can be manipulated with microwave pulses and read out with laser, even at room temperature. However, the photon collection efficiency of bulk diamond is greatly reduced by refraction at the diamond/air interface. To address this issue, we fabricated arrays of diamond nanostructures, differing in both diameter and top end shape, with HSQ and Cr as the etching mask materials, aiming toward large scale fabrication of single-photon sources with enhanced collection efficiency made of nitrogen vacancy (NV) embedded diamond. With a mixture of O2 and CHF3 gas plasma, diamond pillars with diameters down to 45 nm were obtained. The top end shape evolution has been represented with a simple model. The tests of size dependent single-photon properties confirmed an improved single-photon collection efficiency enhancement, larger than tenfold, and a mild decrease of decoherence time with decreasing pillar diameter was observed as expected. These results provide useful information for future applications of nanostructured diamond as a single-photon source.

Publication DOI:
Divisions: Engineering & Applied Sciences > Electrical, electronic & power engineering
Engineering & Applied Sciences > Polymer and advanced materials research group
Additional Information: © IOP
Uncontrolled Keywords: diamond,large scale fabrication,nitrogen vacancy,single-photon source,Physics and Astronomy(all)
Full Text Link: http://iopscien ... 56/25/11/118105
Related URLs: http://www.scop ... tnerID=8YFLogxK (Scopus URL)
Published Date: 2016-11
Authors: Jiang, Qianqing
Li, Wuxia
Tang, Chengchun
Chang, Yanchun
Hao, Tingting
Pan, Xinyu
Ye, Haitao ( 0000-0002-4005-4922)
Li, Junjie
Gu, Changzhi



Version: Accepted Version

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