High stability multiplexed fibre interferometer and its application on absolute displacement measurement and on-line surface metrology

Lin, Dejiao, Jiang, Xiangqian, Xie, Fang, Zhang, Wei, Zhang, Lin and Bennion, Ian (2004). High stability multiplexed fibre interferometer and its application on absolute displacement measurement and on-line surface metrology. Optics Express, 12 (23), pp. 5729-5734.

Abstract

We propose a self-reference multiplexed fibre interferometer (MFI) by using a tunable laser and fibre Bragg grating (FBG). The optical measurement system multiplexes two Michelson fibre interferometers with shared optical path in the main part of optical system. One fibre optic interferometer is used as a reference interferometer to monitor and control the high accuracy of the measurement system under environmental perturbations. The other is used as a measurement interferometer to obtain information from the target. An active phase tracking homodyne (APTH) technique is applied for signal processing to achieve high resolution. MFI can be utilised for high precision absolute displacement measurement with different combination of wavelengths from the tuneable laser. By means of Wavelength-Division-Multiplexing (WDM) technique, MFI is also capable of realising on-line surface measurement, in which traditional stylus scanning is replaced by spatial light-wave scanning so as to greatly improve the measurement speed and robustness. © 2004 Optical Society of America.

Publication DOI: https://doi.org/10.1364/OPEX.12.005729
Divisions: Engineering & Applied Sciences > Electrical, Electronic & Power Engineering
Engineering & Applied Sciences > Aston Institute of Photonics Technology
Additional Information: © 2004 OSA This paper was published in Optics Express and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/OPEX.12.005729. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
Uncontrolled Keywords: interferometry,fiber optics,phase measurement,surface measurements,Atomic and Molecular Physics, and Optics
Full Text Link:
Related URLs: http://www.scop ... tnerID=8YFLogxK (Scopus URL)
http://www.opti ... I=oe-12-23-5729 (Publisher URL)
Published Date: 2004-11-15
Authors: Lin, Dejiao
Jiang, Xiangqian
Xie, Fang
Zhang, Wei ( 0000-0002-3584-8541)
Zhang, Lin ( 0000-0002-1691-5577)
Bennion, Ian

Download

[img]

Version: Published Version


Export / Share Citation


Statistics

Additional statistics for this record