UV femtosecond laser inscribes a 300 nm period nanostructure in a pure fused silica

Dubov, Mykhaylo; Mezentsev, Vladimir; Bennion, Ian and Nikogosyan, David N. (2007). UV femtosecond laser inscribes a 300 nm period nanostructure in a pure fused silica. Measurement science and technology, 18 (7), L15 -L17.

Abstract

We report on the first recording of a periodic structure of ~150 nm pitch in a permanently moving sample of a pure fused silica using the tightly focused, 82 nJ, 267 nm, 300 fs, 1 kHz laser pulses.

Publication DOI: https://doi.org/10.1088/0957-0233/18/7/L02
Divisions: Engineering & Applied Sciences > Electrical, electronic & power engineering
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Additional Information: © 2007 IOP Publishing Ltd.
Uncontrolled Keywords: fused silica, microfabrication, ultrashort pulses, ultraviolet radiation, DIC microscopy, femtosecond UV laser, nanostructure
Published Date: 2007-05-21

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