Vertical multiple-slot waveguide ring resonators in silicon nitride

Vivien, Laurent, Marris-Morini, Delphine, Griol, Amadeu, Gylfason, Kristinn B., Hill, Daniel, Álvarez, Jesús, Sohlström, Hans, Hurtado, Juan, Bouville, David and Cassan, Eric (2008). Vertical multiple-slot waveguide ring resonators in silicon nitride. Optics Express, 16 (22), pp. 17237-17242.

Abstract

This article describes the first demonstration of ring resonators based on vertical multiple-slot silicon nitride waveguides. The design, fabrication and measurement of multiple-slot waveguide ring resonators with several coupling distances and ring radii (70 μm, 90 μm and 110 μm) have been carried out for TE and TM polarizations at the wavelength of 1.3 μm. Quality factors of 6,100 and 16,000 have been achieved for TE and TM polarization, respectively.

Publication DOI: https://doi.org/10.1364/OE.16.017237
Divisions: Engineering & Applied Sciences > Institute of Photonics
Additional Information: ©2008 Optical Society of America. This is an open access article according to the OSA Publishing guidelines https://www.osapublishing.org/submit/review/open-access-policy-statement.cfm
Uncontrolled Keywords: Atomic and Molecular Physics, and Optics
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Related URLs: http://www.scop ... tnerID=8YFLogxK (Scopus URL)
https://www.osa ... =oe-16-22-17237 (Publisher URL)
Published Date: 2008-10-27
Authors: Vivien, Laurent
Marris-Morini, Delphine
Griol, Amadeu
Gylfason, Kristinn B.
Hill, Daniel ( 0000-0003-3510-7783)
Álvarez, Jesús
Sohlström, Hans
Hurtado, Juan
Bouville, David
Cassan, Eric

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