Femtosecond laser microfabrication of subwavelength structures in photonics

Mezentsev, Vladimir, Petrovic, Jovana, Dubov, Mykhaylo, Bennion, Ian, Dreher, Jürgen, Schmitz, Holger and Grauer, Rainer (2007). Femtosecond laser microfabrication of subwavelength structures in photonics. IN: Laser-based micro- and nanopackaging and assembly. Pfleging, Wilhelm; Lu, Yongfeng; Washio, Kunihiko; Bachmann, Friedrich G. and Hoving, Willem (eds) SPIE proceedings, 6459 . SPIE.

Abstract

This paper describes experimental and numerical results of the plasma-assisted microfabrication of subwavelength structures by means of point-by point femtosecond laser inscription. It is shown that the spatio-temporal evolution of light and plasma patterns critically depend on input power. Subwavelength inscription corresponds to the supercritical propagation regimes when pulse power is several times self-focusing threshold. Experimental and numerical profiles show quantitative agreement.

Publication DOI: https://doi.org/10.1117/12.705800
Divisions: Engineering & Applied Sciences > Electrical, electronic & power engineering
Engineering & Applied Sciences > Institute of Photonics
Additional Information: Vladimir Mezentsev ; Jovana S. Petrovic ; Mykhaylo Dubov ; Ian Bennion ; Jürgen Dreher ; Holger Schmitz and Rainer Grauer, "Femtosecond laser microfabrication of subwavelength structures in photonics", Proc. SPIE 6459, Laser-based Micro- and Nanopackaging and Assembly, 64590B (March 13, 2007); doi:10.1117/12.705800. Copyright 2006 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic electronic or print reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. http://dx.doi.org/10.1117/12.705800
Event Title: Laser-based micro- and nanopackaging and assembly
Event Type: Other
Event Dates: 2007-01-22 - 2007-01-24
Uncontrolled Keywords: light propagation,photonic devices,photonics,ultrashort pulses,femtosecond laser inscription,self-focusing threshold,subwavelength structures,Electrical and Electronic Engineering,Condensed Matter Physics
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Related URLs: http://www.scop ... tnerID=8YFLogxK (Scopus URL)
http://proceedi ... ticleid=1297447 (Publisher URL)
Published Date: 2007-03-13
Authors: Mezentsev, Vladimir ( 0000-0002-8415-1767)
Petrovic, Jovana
Dubov, Mykhaylo ( 0000-0002-6764-683X)
Bennion, Ian
Dreher, Jürgen
Schmitz, Holger
Grauer, Rainer

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