Micro-holographic methods for sub-micrometer grating fabrication in fused silica with UV femtosecond laser

Dubov, Mykhaylo; Nasyrov, Ruslan K.; Nikogosyan, David N.; Poleshchuk, Alexander G.; Mezentsev, Vladimir and Bennion, Ian (2008). Micro-holographic methods for sub-micrometer grating fabrication in fused silica with UV femtosecond laser. IN: Optical Design and Engineering III. Mazuray, Laurent; Wartmann, Rolf; Wood, Andrew; Tissot, Jean-Luc and Raynor, Jeffrey M. (eds) SPIE proceedings, 7100 . SPIE.

Abstract

The optical layouts incorporating binary phase diffractive grating and a standard micro-objective were used for femtosecond microfabrication of periodical structures in fused silica. Two beams, generated in Talbot type interferometer, interfered on a surface and in the bulk of the sample. The method suggested allows better control over the transverse size of the grating pitch, and thus control the reflection strength of the waveguide or fibre grating. We present the examples of direct inscription of the sub-micrometer periodical structures using a 267 nm femtosecond laser radiation.

Additional Information: Copyright 2008 Society of Photo-Optical Instrumentation Engineers. One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.
Event Title: Optical Design and Engineering III
Event Type: Other
Event Location: Glasgow
Event Dates: 2008-09-02 - 2008-09-05
Uncontrolled Keywords: fiber Bragg gratings, holograms, micrometers, optical design, optical engineering, oxides, pulsed laser applications, silica, thickness measurement, ultrashort pulses, Bragg, femtosecond, grating, micro-holographic, Talbot, UV, Computer Science Applications, Electrical and Electronic Engineering, Electronic, Optical and Magnetic Materials, Applied Mathematics, Condensed Matter Physics
Published Date: 2008-09-27

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