Displacement sensor using channelled spectrum dispersed on a linear CCD array

Taplin, S.; Podleanu, A.G.; Webb, David J. and Jackson, David A. (1993). Displacement sensor using channelled spectrum dispersed on a linear CCD array. Electronics letters, 29 (10), pp. 896-897.

Abstract

A novel form of low coherence interferometric sensor is described. The channelled spectrum produced by illuminating a sensing interferometer with a broadband source is analysed directly using a CCD array. The system currently provides unambiguous measurement over a range of 1.5 mm with an accuracy of better than 6 µm.

Uncontrolled Keywords: laser diode source, channelled spectrum, linear CCD array, low coherence interferometric sensor, broadband source, 1.5 mm
Published Date: 1993-05-13

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